General Information

Short name: EP4

Device Name: Nanofilm_EP4

Manufacturer: Accurion GmbH, Göttingen

Installation location: P8.2.35

Date of delivery: 24.10.2022

Device description: Imaging Ellipsometry analyses the change of polarization of light reflected from a sample, yielding information on its morphology (thickness of encompassed layer) and optical properties (refractive index, absorption). Combining ellipsometry and microscopy, imaging ellipsometry enables thin film and structured materials characterization with a lateral resolution down to 1 µm. Equipped with the Mueller-matrix upgrade, the instrument enables the characterization of anisotropic thin-film and substrates.

Specifications

Measurement modes: nulling ellipsometry, variable angle spectroscopic ellipsometry, Brewster angle microscopy, Mueller-matrix ellipsometry.

Lateral resolution: 2 µm (10x objective), 1 µm (20x objective)

Light source: Laser driven Xenon light source (LDXe) with Grating Monochromator (360 – 1700 nm) / Laser light source (50 mW @658 nm) / Knife Edge Illumination module for transparent samples

Safety: Interlock and cabinet for laser safety