List of the Cleanroom Equipment

Device Name Responsible
Accurion EP4 (Dünnfilmmessgerät/Ellipsometer, Accurion GmbH) Infrastructure Team 1
AFM (Atomic Force Microscope, Bruker Nano GmbH) Infrastructure Team 1
LSM 980 (Two-Photon-Microscope, Carl Zeiss AG) Infrastructure Team 1
Nanoscribe Quantum X align (3D Lithography System, Nanoscribe GmbH) Infrastructure Team 2

Auflistung des Reinraum-Equipments

Gerätebezeichnung Zuordnung
Accurion EP4 (Dünnfilmmessgerät/Ellipsometer, Accurion GmbH) Infrastruktur-Team 1
AFM (Rasterkraftmikroskop, Bruker Nano GmbH) Infrastruktur-Team 1
LSM 980 (Zwei-Photonen-Mikroskop, Carl Zeiss AG) Infrastruktur-Team 1
Nanoscribe Quantum X align (3D Lithografiesystem, Nanoscribe GmbH) Infrastruktur-Team 2