List of the Cleanroom Equipment
| Device Name | Responsible |
| Accurion EP4 (Dünnfilmmessgerät/Ellipsometer, Accurion GmbH) | Infrastructure Team 1 |
| AFM (Atomic Force Microscope, Bruker Nano GmbH) | Infrastructure Team 1 |
| LSM 980 (Two-Photon-Microscope, Carl Zeiss AG) | Infrastructure Team 1 |
| Nanoscribe Quantum X align (3D Lithography System, Nanoscribe GmbH) | Infrastructure Team 2 |
Auflistung des Reinraum-Equipments
| Gerätebezeichnung | Zuordnung |
| Accurion EP4 (Dünnfilmmessgerät/Ellipsometer, Accurion GmbH) | Infrastruktur-Team 1 |
| AFM (Rasterkraftmikroskop, Bruker Nano GmbH) | Infrastruktur-Team 1 |
| LSM 980 (Zwei-Photonen-Mikroskop, Carl Zeiss AG) | Infrastruktur-Team 1 |
| Nanoscribe Quantum X align (3D Lithografiesystem, Nanoscribe GmbH) | Infrastruktur-Team 2 |